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Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering
- 2019 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2019
DOI:
http://dx.doi.org/10.3762/bjnano.10.149 Journal data
Journal:
BEILSTEIN JOURNAL OF NANOTECHNOLOGY
Vol.:
10
Pag.:
1511 1522