Pulsed Laser Deposition of Aluminum Nitride Films: Correlation between Mechanical, Optical, and Structural Properties

Publication type: 
Journal
Autori: 
Kolaklieva, L; Chitanov, V; Szekeres, A; Antonova, K; Terziyska, P; Fogarassy, Z; Petrik, P; Mihailescu, IN; Duta, L
Anul: 
2019
DOI: 
http://dx.doi.org/10.3390/coatings9030195

Journal data

Journal: 
COATINGS
Vol.: 
9
Pag.: 
195