Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering

Publication type: 
Journal
Autori: 
Velicu, IL; Ianos, GT; Porosnicu, C; Mihaila, I; Burducea, I; Velea, A; Cristea, D; Munteanu, D; Tiron, V
Anul: 
2019
DOI: 
http://dx.doi.org/10.1016/j.surfcoat.2018.12.079

Journal data

Journal: 
SURFACE & COATINGS TECHNOLOGY
Vol.: 
359
Pag.: 
97 107