AlN thin films for piezoelectric devices

Publication type: 
Conference / Workshop
Autori: 
H. Stroescu, M. Anastasescu, L. Duta, I.N. Mihailescu, G.E. Stan, A. Szekeres, C. Moldovan, M. Zaharescu, M. Gartner
Anul: 
2019

Conference / Workshop data

Conference / Workshop: 
E-MRS Spring Meeting
Location: 
Nice, France
Presentation method: 
oral presentation