Influence of the pulsed laser deposition conditions on the microstructure and mechanical properties of thin AlN films

Publication type: 
Conference / Workshop
Autori: 
A. Szekeres, A. Cziraki, Zs. Fogarassy, L. Kolaklieva, V. Chitanov, P. Terziyska, G.E. Stan, I.N. Mihailescu, L. Duta
Anul: 
2019

Conference / Workshop data

Conference / Workshop: 
Twenty-First International Summer School On Vacuum, Electron And Ion Technologies (VEIT 2019)
Location: 
Sozopol, Bulgaria
Presentation method: 
poster presentation