Mass spectrometry investigation during magnetron sputtering of PTFE

Publication type: 
Conference / Workshop
Autori: 
S.D. Stoica, B. Mitu, V. Satulu, G. Dinescu
Anul: 
2019

Conference / Workshop data

Conference / Workshop: 
XVIIIth International Conference on Plasma Physics and Application
Location: 
Iasi, Romania
Period: 
20th-22nd June
Presentation method: 
poster presentation