Atmospheric Pressure Plasma Deposition of Organosilicon Thin Films by Direct Current and Radio-frequency Plasma Jets

Kuchakova, I; Ionita, MD; Ionita, ER; Lazea-Stoyanova, A; Brajnicov, S; Mitu, B; Dinescu, G; De Vrieze, M; Cvelbar, U; Zille, A; Leys, C; Yu Nikiforov, A