![fiipregatit](https://inflpr.ro/sites/all/themes/fast.png)
Study of a HPPMS discharge in Ar/O2 mixture: I. Discharge characteristics with Ru cathode
- 2009 |
- Publications |
- Journals
Publication type:
Journal
Anul:
2009 Journal data
Journal:
Plasma Sources Sci. Technol
Vol.:
18
Pag.:
45025
ISI factor:
2.685